有源矩阵基板及其制造方法以及使用由该方法所制造的有源矩阵基板的显示设备

Active element substrate and manufacturing method thereof, and display apparatus using active element substrate manufactured by this manufacturing method

Abstract

Provided are an active element substrate and a manufacturing method thereof, wherein the number of photolithographic processes is reduced and the manufacturing cost is reduced, and a display apparatus using an active element substrate manufactured by this manufacturing method. In a process to form pixels on an active substrate which constitutes a display apparatus, a photo resist film or a black photo resist film formed on an active element and a display electrode by coating is subjected to half-tone exposure to form a bank or etching pattern to thereby process an insulation film and a transparent conductive film or a color filter is formed by an ink-jet method.
本发明提供了有源矩阵基板及其制造方法,其中减少光刻工艺的数量,并降低制造成本。本发明还提供了使用由该制造方法所制造的有源矩阵基板的显示设备。在用于在有源基板上形成构成显示设备的像素的工艺中,通过对光致抗蚀剂膜或者对其中通过涂布制备有源矩阵和显示电极的黑色光致抗蚀剂膜执行半色调曝光来形成堤或蚀刻图形,由此处理绝缘膜,并且通过喷墨法来制备透明导电膜和彩色滤光片。

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