一种硅片自动纠偏装置

Automatic silicon wafer deviation-rectifying device

Abstract

本发明涉及一种硅片自动纠偏装置。其包括机架、硅片输送机构和硅片纠偏机构;机架的左竖板、右竖板分别竖直固定在机架台板后部的两端,中竖板竖直固定在机架台板后部的中间,连接板后端固定在中竖板上;硅片输送机构包括电缸、气缸、连接块和真空吸盘,电缸水平设置,其两端分别固定在左竖板、右竖板上,电缸有一个可横向水平往复移动的滑动块,气缸固定在该滑动块上,连接块固定在气缸的活塞杆端,在连接块上固定安装有用于吸取硅片的真空吸盘;硅片纠偏机构安装在机架上,并位于硅片输送机构的移动路径上。本发明结构巧妙合理,能够自动调整硅片位置,使得后续硅片焊接时,互联条与硅片待焊接处重合,确保硅片自动焊接的准确率。
The invention relates to an automatic silicon wafer deviation-rectifying device, which comprises a rack, a silicon wafer conveying mechanism and a silicon wafer deviation-rectifying mechanism, wherein a left vertical plate and a right vertical plate of the rack are respectively vertically fixed at the two ends of the rear part of a sole plate of the rack; a middle vertical plate is vertically fixed in the middle of the rear part of the sole plate of the rack; the rear end of a connecting plate is fixed on the middle vertical plate; the silicon wafer conveying mechanism comprises an electric cylinder, a gas cylinder, a connecting block and a vacuum chuck; the electric cylinder is horizontally arranged, and the two ends of the electric cylinder are respectively fixed on the left vertical plate and the right vertical plate; the electric cylinder is provided with a sliding block capable of moving back and forth in the transverse and horizontal direction; the gas cylinder is fixed on the sliding block; the connecting block is fixed at the end of a piston rod of the gas cylinder; the vacuum chuck for absorbing the silicon wafer is fixed on the connecting block; and the silicon wafer deviation-rectifying mechanism is arranged on the rack and positioned on the moving path of the silicon wafer conveying mechanism. The automatic silicon wafer deviation-rectifying device has a smart and reasonable structure and can automatically adjust the position of the silicon wafer, so that an interconnection strip and the position of the silicon wafer to be welded are superposed during welding of the following silicon wafer to ensure the accuracy rate of automatically welding the silicon wafer.

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