Manufacturing method of combined SU-8-material inlaid two-dimensional focusing X-ray refraction lens

Su-8材料镶嵌式二维聚焦x射线组合折射透镜的制作方法

Abstract

一种SU-8材料镶嵌式二维聚焦X射线组合折射透镜的制作方法,包括以下步骤:(1)所述SU-8材料镶嵌式二维聚焦X射线组合折射透镜的母镜的制作步骤;(2)所述SU-8材料镶嵌式二维聚焦X射线组合折射透镜的子镜的制作步骤;(3)所述SU-8材料镶嵌式二维聚焦X射线组合折射透镜的组装步骤:(M)将制成的母镜和子镜置于显微镜下,发现并夹住子镜的夹持臂,将子镜的嵌入镜体对准母镜的正方形孔,子镜上的N个嵌入镜体与母镜上的N个正方形孔一一对应,嵌入并轻轻压紧,完成镶嵌式二维聚焦X射线组合折射透镜的制作。本发明制作工艺精度高、得到的透镜光轴可高精度自校准、聚焦效率高。
The invention relates to a manufacturing method of a combined SU-8-material inlaid two-dimensional focusing X-ray refraction lens, comprising the following steps of: (1) manufacturing a primary lens of the combined SU-8-material inlaid two-dimensional focusing X-ray refraction lens; (2) manufacturing a secondary lens of the combined SU-8-material inlaid two-dimensional focusing X-ray refraction lens; and (3) assembling the combined SU-8-material inlaid two-dimensional focusing X-ray refraction lens: (M) placing the manufactured primary lens and secondary lens under a microscope, finding out and clamping holding arms of the secondary lens, aligning inlaid lens bodies of the secondary lens to square holes of the primary lens, enabling N inlaid lens bodies of the secondary lens to correspond to N square holes of the primary lens in a one-to-one manner, inlaying and lightly pressing out to finish the manufacture of the combined inlaid two-dimensional focusing X-ray refraction lens. The manufacturing method of the combined SU-8-material inlaid two-dimensional focusing X-ray refraction lens, disclosed by the invention, has high precision, the obtained lens axis can be self-calibrated with high precision and the focusing efficiency is high.

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Cited By (2)

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    CN-102214493-AOctober 12, 2011浙江工业大学Method for manufacturing metal paraboloid-shaped two-dimensionally-focused X-ray combined refractor
    WO-2012122751-A1September 20, 2012浙江工业大学Procédé pour fabriquer une lentille de réfraction combinée à rayons x à focalisation en deux dimensions du type paraboloïdal